dc.contributor.author | MACHLIN, E.S. | |
dc.date.accessioned | 2020-11-18T09:20:59Z | |
dc.date.available | 2020-11-18T09:20:59Z | |
dc.date.issued | 2005 | |
dc.identifier.isbn | 0080 44640 X | |
dc.identifier.uri | http://10.250.8.41:8080/xmlui/handle/123456789/12700 | |
dc.language.iso | en_US | en_US |
dc.publisher | Elsevier | en_US |
dc.title | MATERIALS SCIENCE IN MICROELECTRONICS VOLUME 1 | en_US |
dc.title.alternative | THE RELATIONSHIPS BETWEEN THIN FILM PROCESSINGAND STRUCTURE | en_US |
dc.type | Book | en_US |