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dc.contributor.author Chang Liu
dc.date.accessioned 2020-11-26T10:43:28Z
dc.date.available 2020-11-26T10:43:28Z
dc.date.issued 2012
dc.identifier.isbn 978-0-13-249736-7
dc.identifier.uri http://10.250.8.41:8080/xmlui/handle/123456789/14217
dc.publisher Pearson Education, en_US
dc.relation.ispartofseries Second Edition;
dc.subject Foundation of MEMS en_US
dc.title Foundation of MEMS en_US
dc.type Book en_US


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