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dc.contributor.author Stephen Beeby
dc.date.accessioned 2020-12-09T03:31:35Z
dc.date.available 2020-12-09T03:31:35Z
dc.date.issued 2004
dc.identifier.uri http://10.250.8.41:8080/xmlui/handle/123456789/17021
dc.publisher ARTECH HOUSE, INC.
dc.subject Physics
dc.title MEMS Mechanical Sensors


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