Development of Microstructure for Mechanical Fatique Testing of Thin Film Silicon used for Fabrication of MEMS Inertial Sensor

dc.contributor.author	Asif, Azka
dc.date.accessioned	2020-12-31T07:25:38Z
dc.date.available	2020-12-31T07:25:38Z
dc.date.issued	2019
dc.identifier.uri	http://10.250.8.41:8080/xmlui/handle/123456789/20171
dc.description	Supervisor: Dr. Muhammad Mubasher Saleem	en_US
dc.publisher	CEME, National University of Science and Technology Islamabad	en_US
dc.subject	Mechatronics Engineering, MEMS	en_US
dc.title	Development of Microstructure for Mechanical Fatique Testing of Thin Film Silicon used for Fabrication of MEMS Inertial Sensor	en_US
dc.type	Thesis	en_US