Abstract:
This work presents the design of a dual-axis electrostatic MEMS accelerometer to achieve low
cross-axis sensitivity and low noise while considering the microfabrication constraints of
commercially available multi-user SOIMUMPs process. The suspension beams are designed to
minimize the cross-axis coupling and increase mechanical stability. The MEMS accelerometer
design is optimized using a new optimization methodology to achieve robust dynamic response in
the operating temperature range of −40 ᵒC to 100 ᵒC. The optimization methodology involves the
use of integrated design and analysis of computer experiments, Gaussian process regression,
desirability function approach and FEM simulations. The effect of temperature variations on the
squeeze film air damping force in the electrostatic sensing combs and corresponding effect on the
dynamic response is analyzed and considered in the optimization study. The voltage sensitivity of
the proposed MEMS accelerometer design is obtained by the integration of accelerometer
behavioral model with the readout electronics in the MATLAB Simulink environment. The input
acceleration range for the proposed MEMS accelerometer design is ±25 g with cross-axis
sensitivity less than 0.03 % and total noise equivalent acceleration (TNEA) value of 0.2 mg⁄√Hz.
