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Development of Microstructure for Mechanical Fatigue Testing of Thin Film Silicon Used for Fabrication of MEMS Inertial Sensors
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| dc.contributor.author | Asif, Azka | |
| dc.date.accessioned | 2023-08-09T06:22:54Z | |
| dc.date.available | 2023-08-09T06:22:54Z | |
| dc.date.issued | 2019 | |
| dc.identifier.other | 205369 | |
| dc.identifier.uri | http://10.250.8.41:8080/xmlui/handle/123456789/35898 | |
| dc.description | Supervisor: Dr Muhammad Mubasher Saleem | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | College of Electrical & Mechanical Engineering (CEME), NUST | en_US |
| dc.title | Development of Microstructure for Mechanical Fatigue Testing of Thin Film Silicon Used for Fabrication of MEMS Inertial Sensors | en_US |
| dc.type | Thesis | en_US |
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MS [207]