Abstract:
The microbolometer based detector has been attaining huge prominence due to their improvements
in performance parameters, small size, economy and uncooled operation. Currently, it has been
extensively utilized in night vision systems, firefighting applications, detection of gas leakage in
industries, security surveillance, and medical monitors due to its application under disapproving
circumstances like heavy rain, foggy weather or snow fall. Imaging and detection is based upon
absorption of IR radiations. When infrared light strikes the sensor, bolometer changes its resistance
due to variation in temperature. For night vision imaging applications microbolometer based
sensor operated at room temperature has gained much attraction. A compact and stable suspended
micro-bridge structure for high resolution thermal IR imaging sensors is presented in this report.
The suspended bridge supporting pillars and biasing contacts have been placed under the active
layer to make the microbolometer more compact and robust. Thermal conductivity of the cell can
be well controlled by varying pillar size and their number without affecting the sensing area
