MSE 852  HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY

dc.contributor.author	Hoffman, Dorothy M.
dc.contributor.author	Singh, Bawa
dc.contributor.author	Thomas, John H.
dc.date.accessioned	2024-10-09T10:40:25Z
dc.date.available	2024-10-09T10:40:25Z
dc.date.issued	1998
dc.identifier.isbn	978-0-12-352065-4
dc.identifier.uri	http://10.250.8.41:8080/xmlui/handle/123456789/47093
dc.language.iso	en_US	en_US
dc.publisher	Academic press	en_US
dc.subject	Vacuum technology—Handbooks	en_US
dc.subject	Vacuum technology—Handbooks, manuals	en_US
dc.title	MSE 852 HANDBOOK OF VACUUM SCIENCE AND TECHNOLOGY	en_US
dc.type	Book	en_US