Abstract:
The dissertation presents the design and optimization of electrothermally actuated
micromirror based on Micro electromechanical system (MEMS) technology. MEMS
micromirrors are used in a variety of applications such as projection imaging, bar code scanning,
optical switching, microscopic topometry and biomedical imaging like Optical Coherence
Tomography. The main focus in this work is to design MEMS scanners for Optical Coherence
Tomography with optimum deflection angle. The optimization is based on actuator design,
device dimensions and layout using design of experiments techniques. The proposed micromirror
device is capable of generating an angular deflection of 44 degress at low input power of 2.9mw.
The device can operate in piston mode at a high displacement of 500 um. The FEM analysis of
the device is simulated in ANSYS.
