Silicon Technologies : Ion Implantation and Thermal Treatment /

dc.contributor.author	[Ed.] Baudrant, Annie
dc.date.accessioned	2025-02-11T05:29:42Z
dc.date.available	2025-02-11T05:29:42Z
dc.date.issued	2011
dc.identifier.isbn	978-1-84821-231-2
dc.identifier.uri	http://10.250.8.41:8080/xmlui/handle/123456789/49671
dc.language.iso	en_US	en_US
dc.publisher	Wiley; ISTE Ltd.	en_US
dc.subject	Semiconductor doping	en_US
dc.subject	Ion implantation	en_US
dc.subject	Semiconductors--Heat treatment	en_US
dc.title	Silicon Technologies : Ion Implantation and Thermal Treatment /	en_US
dc.type	Book	en_US