Abstract:
This work presents the movement of MEMS micromirrors using electrothermal
actuation principal. MEMS mirrors specifically micromirrors having thermal
actuation have been used in many applications of biomedical for advancing Optical
Coherence Tomography. Micromirrors have been designed based on difference in
actuation principal techniques like electrostatic, piezo-resistive, and electromagnetic.
Those designed based on electrostatic, piezo-resistive, and electromagnetic
techniques uses capacitive, resistive, electromagnetic, and electrostatic principles.
That’s why they have less scope in biomedical applications.
In my thesis work, design of MEMEs electrothermal in plane micro actuator is
analyzed for maximμm output results. Target of maximμm displacement and
minimμm temperature on plate is achieved by designing different geometries which
can be fabricated using SOI MΜMPs fabrication process. Analysis and optimization
are carried out for electrothermal actuators using ANSYS AIM and DOE process
technique. FEM analysis is carried out on the design to measure the performance
characteristics of output displacement and plate temperature at simulation level to
ensure required and efficient working. Device performance in the presence of
temperature is analyzed in detail and hence all the parameters are varied using DOE
techniques. Static Experiments have been performed in Minitab software to calculate
the input parameters effect on output. This DOE involves placket-Burman analysis,
full factorial analysis and regression analysis. The mirror can generate 0.7μm
deflection at minimμm voltage of 3.6V. The minimμm temperature at input voltage
of 3.6v is 42 °C with an input power of 140 mW. Tilt angle of micromirror comes
out to be 0.8° at 3.6 V. The simulations are done in ANSYS software.
