Design and Analysis of MEMS Based Electrothermal Mirrors Using Single Material Micro Actuator

Abstract

This work presents the movement of MEMS micromirrors using electrothermal actuation principal. MEMS mirrors specifically micromirrors having thermal actuation have been used in many applications of biomedical for advancing Optical Coherence Tomography. Micromirrors have been designed based on difference in actuation principal techniques like electrostatic, piezo-resistive, and electromagnetic. Those designed based on electrostatic, piezo-resistive, and electromagnetic techniques uses capacitive, resistive, electromagnetic, and electrostatic principles. That’s why they have less scope in biomedical applications. In my thesis work, design of MEMEs electrothermal in plane micro actuator is analyzed for maximμm output results. Target of maximμm displacement and minimμm temperature on plate is achieved by designing different geometries which can be fabricated using SOI MΜMPs fabrication process. Analysis and optimization are carried out for electrothermal actuators using ANSYS AIM and DOE process technique. FEM analysis is carried out on the design to measure the performance characteristics of output displacement and plate temperature at simulation level to ensure required and efficient working. Device performance in the presence of temperature is analyzed in detail and hence all the parameters are varied using DOE techniques. Static Experiments have been performed in Minitab software to calculate the input parameters effect on output. This DOE involves placket-Burman analysis, full factorial analysis and regression analysis. The mirror can generate 0.7μm deflection at minimμm voltage of 3.6V. The minimμm temperature at input voltage of 3.6v is 42 °C with an input power of 140 mW. Tilt angle of micromirror comes out to be 0.8° at 3.6 V. The simulations are done in ANSYS software.