Abstract:
The dissertation presents the design of an electrostatically actuated multi-DoF micro-electromechanical system (MEMS) gyroscope having the 1-DOF in the sensing mode while 2-DOF in
driving mode. MEMS gyroscope are used in multiple applications such as inertial navigation, in
automobiles, image stabilization and many other potential applications. The main emphasis in this
effort is to propose a non-resonant gyroscope, having multi-degree-of-freedom(multi-DoF) and it
follows the design limitations of SOI-MUMPs fabrication process which is commercially available
and is offered by MEMSCAP Inc, USA. The optimization is based on the device dimensions and
layout using the parametric optimization technique. The proposed device is having the bandwidth
of 1772 Hz with an average dynamic amplification of 2.89 within the flat operation region and
having the sensitivity of 3.27 𝑚𝑉/°/𝑠. The finite element analysis (FEM analysis) of the device
is simulated in ANSYS.
