Design and Analysis of Multi-DoF MEMS Gyroscope for Inertial Navigation using SOI-MUMPs Fabrication Process

Abstract

The dissertation presents the design of an electrostatically actuated multi-DoF micro-electromechanical system (MEMS) gyroscope having the 1-DOF in the sensing mode while 2-DOF in driving mode. MEMS gyroscope are used in multiple applications such as inertial navigation, in automobiles, image stabilization and many other potential applications. The main emphasis in this effort is to propose a non-resonant gyroscope, having multi-degree-of-freedom(multi-DoF) and it follows the design limitations of SOI-MUMPs fabrication process which is commercially available and is offered by MEMSCAP Inc, USA. The optimization is based on the device dimensions and layout using the parametric optimization technique. The proposed device is having the bandwidth of 1772 Hz with an average dynamic amplification of 2.89 within the flat operation region and having the sensitivity of 3.27 𝑚𝑉/°/𝑠. The finite element analysis (FEM analysis) of the device is simulated in ANSYS.