Abstract:
Micro-Electro-Mechanical System (MEMS) gyroscopes widely used inertial sensors used for
detecting and measuring the angular motion. The rotation rate is measured by these sensors is
around a particular axis or multiple axis. The proposed model of the MEMS gyroscope is aimed
at improving robustness and dynamic motion amplification of totally decoupled non resonant
vibratory gyroscope using multi mass concept. A novel mechanical structural design is realised for
MEMS gyroscope that provides inherent robustness to counter structural parametric variations and
environmental fluctuations. The major focus is improving the gain and hence the sensitivity of the
gyroscope by transferring the complexity of control electronics to improved mechanical design of
gyroscope dynamical system. The major approach pursued in this model is to explore the
possibility of realizing the wide-bandwidth frequency response without significantly sacrificing
the gain for the drive mode of vibratory gyroscopes. Results of the proposed micro gyroscope are
validated using mathematical modelling on MATLAB and FEM simulations on
ANSYS/COMSOL.
