Design, FEM Modeling and Optimization of 3-DOF Drive Mode Microgyroscope

Abstract

Micro-Electro-Mechanical System (MEMS) gyroscopes widely used inertial sensors used for detecting and measuring the angular motion. The rotation rate is measured by these sensors is around a particular axis or multiple axis. The proposed model of the MEMS gyroscope is aimed at improving robustness and dynamic motion amplification of totally decoupled non resonant vibratory gyroscope using multi mass concept. A novel mechanical structural design is realised for MEMS gyroscope that provides inherent robustness to counter structural parametric variations and environmental fluctuations. The major focus is improving the gain and hence the sensitivity of the gyroscope by transferring the complexity of control electronics to improved mechanical design of gyroscope dynamical system. The major approach pursued in this model is to explore the possibility of realizing the wide-bandwidth frequency response without significantly sacrificing the gain for the drive mode of vibratory gyroscopes. Results of the proposed micro gyroscope are validated using mathematical modelling on MATLAB and FEM simulations on ANSYS/COMSOL.