Abstract:
The dissertation presents the design of an electrothermally actuated micromirror based on Micro
electromechanical system (MEMS) technology. MEMS micromirrors are used in a variety of
applications such as projection imaging, optical switching, bar code scanning, microscopic
topometry and biomedical imaging like Optical Coherence Tomography. The main emphasis in
this effort is to design MEMS scanners for Optical Coherence Tomography with optimum
deflection angle. The optimization is based on actuator design, device dimensions and layout using
design of experiments techniques. The proposed micromirror device is capable of generating
deflection of 0.6 μm at low input power of 1.08 mW. The FEM analysis of the device is simulated
in ANSYS
