Multi-Response Design Optimization of Two Axes SU-8 based Scanning Micromirror for Endoscopic Imaging

dc.contributor.author	Javaid, Fizza
dc.date.accessioned	2023-08-10T11:40:00Z
dc.date.available	2023-08-10T11:40:00Z
dc.date.issued	2019
dc.identifier.other	00000170885
dc.identifier.uri	http://10.250.8.41:8080/xmlui/handle/123456789/36279
dc.description	Supervisor: Dr. Muhammad Mubasher Saleem	en_US
dc.description.abstract	The dissertation presents the design of an electrothermally actuated micromirror based on Micro electromechanical system (MEMS) technology. MEMS micromirrors are used in a variety of applications such as projection imaging, optical switching, bar code scanning, microscopic topometry and biomedical imaging like Optical Coherence Tomography. The main emphasis in this effort is to design MEMS scanners for Optical Coherence Tomography with optimum deflection angle. The optimization is based on actuator design, device dimensions and layout using design of experiments techniques. The proposed micromirror device is capable of generating deflection of 0.6 μm at low input power of 1.08 mW. The FEM analysis of the device is simulated in ANSYS	en_US
dc.language.iso	en	en_US
dc.publisher	College of Electrical & Mechanical Engineering (CEME), NUST	en_US
dc.subject	Key Words: MEMS, Micromirror, Electrothermal, FEM.	en_US
dc.title	Multi-Response Design Optimization of Two Axes SU-8 based Scanning Micromirror for Endoscopic Imaging	en_US
dc.type	Thesis	en_US