Development of Spray Deposition System for Device Applications

Abstract

There are a number of liquid phase deposition techniques such as spin casting, spray casting, dip casting, electrochemical deposition etc. Spray casting is a versatile process which enables the deposition of a variety of films on complex topographies. This project has two aspects: (1) The development of a spray casting instrument and (2) Deposition & Characterization of spray cast films for device applications. In aspect (1), a nebulizer/atomizer will be connected to a chamber with a rotating chuck. In aspect (2), a dispersed solution will be cast in mist form from the nebulizer and deposited onto the substrate in the chamber. The resulting film will be characterized using SEM, Electrical testing, Optical profilometry and FTIR.